# | Class | status | |
---|---|---|---|
1 |
S:98316054
M:SAION O:Sumitomo Heavy Industries Ion Technology Co., Ltd. |
7 | Pending |
2 |
S:98312376
M:SS-UHE O:Sumitomo Heavy Industries Ion Technology Co., Ltd. |
7 | Pending |
3 |
S:98312386
M:S-UHE O:Sumitomo Heavy Industries Ion Technology Co., Ltd. |
7 | Pending |
4 |
S:86694866
M:SMIT O:Sumitomo Heavy Industries Ion Technology Co., Ltd. |
7 | Registered |
5 |
S:86014458
M:UHE O:SEN Corporation, SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD. |
7 | Registered |
6 |
S:86014466
M:SAION O:SEN Corporation, SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD. |
7 | Registered |
7 |
S:76646382
M:SHX O:SEN CORPORATION, SEN CORPORATION, AN SHI AND AXCELIS COMPANY, Sumitomo Eaton Nova Corporation, SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD. |
7 | Registered |
8 |
S:76599183
M:SEN O:SEN CORPORATION, SEN CORPORATION, AN SHI AND AXCELIS COMPANY, Sumitomo Eaton Nova Corporation, SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD. |
7 | Registered |